Tantalum sputtering target
Product Details:
| Place of Origin | Hunan, China (Mainland) |
|---|
Payment & Shipping Terms:
| Minimum Order Quantity: | 1 Piece/Pieces |
|---|---|
| Packaging Details: | according to the customer's requirements |
| Delivery Time: | 25 days |
| Payment Terms: | L/C,T/T |
Detailed Product Description
Tantalum sputtering target,Tantalum alloy target
Material: R05200, R05400, R05252 (Ta-2.5W), R05255 (Ta-10W)
Size:
circular targets: Diameter 25mm up to 400mm x Thickness 3mm up to 28mm
rectangular targets: Thickness 1mm up to 12.7mm x Width up to 600mm
x Length up to 2000mm
Purity: >=99.95% or 99.99%
Table 1: technology parameter
Grade | 3N, 3N5, 4N, with Ta 99.99%min |
Recrystallization | 95%min |
Grain size | ASTM 4 or finer |
Surface finish | 16Rms max. or Ra 0.4 ( RMS64 or better) |
Flatness | 0.1mm or 0.15% max |
Tolerance | +/-0.010" on all dimensions |
Table 2. Chemical composition:
Chemistry % | |||||||||||||
Designation | Chief component | Impurities maxmium | |||||||||||
Ta | Nb | Fe | Si | Ni | W | Mo | Ti | Nb | O | C | H | N | |
Ta1 | Remainder | 0.004 | 0.003 | 0.002 | 0.004 | 0.004 | 0.002 | 0.03 | 0.015 | 0.004 | 0.0015 | 0.002 | |
Ta2 | Remainder | 0.01 | 0.01 | 0.005 | 0.02 | 0.02 | 0.005 | 0.08 | 0.02 | 0.01 | 0.0015 | 0.01 | |
TaNb3 | Remainder | 3.5 | 0.01 | 0.01 | 0.005 | 0.02 | 0.02 | 0.005 | 0.02 | 0.01 | 0.0015 | 0.01 | |
TaNb20 | Remainder | 17.023.0 | 0.01 | 0.01 | 0.005 | 0.02 | 0.02 | 0.005 | 0.02 | 0.01 | 0.0015 | 0.01 | |
Ta2.5W | Remainder | 0.005 | 0.003 | 0.002 | 3.0 | 0.006 | 0.002 | 0.04 | 0.015 | 0.005 | 0.0015 | 0.006 | |
Ta10W | Remainder | 0.005 | 0.003 | 0.002 | 11 | 0.006 | 0.002 | 0.04 | 0.015 | 0.005 | 0.0015 | 0.006 | |
Special requirements to be agreed on by the supplier and buyer of negotiations |
Tantalum sputtering target
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Company Info
Changsha South Tantalum Niobium Co., Ltd.
[China (Mainland)]
[Verified Member]
City: Changsha
Province/State: Hunan
Country/Region : China (Mainland)
Business Type:Manufacturer
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